Manufacturability analysis of a micro-electro-mechanical systems–based electron-optical system design for direct-write lithography

Journal

Japanese Journal of Applied Physics

Journal Volume

49

Journal Issue

6

Pages

06GE051-06GE057

Date Issued

2010-06

Author(s)

Sheng-Yung Chen

Shin-Chuan Chen

Hsing-Hong Chen

Kuen-Yu Tsai

Hsin-Hung Pan

DOI

URI

Type

journal article