CMOS-MEMS PUF Exploiting Mode Localization in a Multi-DOF Tuned-Mass-Damper Resonator
Part Of
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Start Page
620
End Page
623
ISSN
10846999
ISBN (of the container)
9798331572518
ISBN
9798331572518
Date Issued
2026
Author(s)
Abstract
This work demonstrates, for the first time, a physical unclonable function (PUF) based on a CMOS-MEMS multi-degree-of-freedom (DoF) tuned-mass-damper (TMD) resonator. In particular, building upon the TMD's mode-splitting mechanism and its acute sensitivity to process variations, this study leverages multiple TMD beams to introduce additional modal DoFs, which significantly enhance the mode-localized distributions. This technique amplifies random manufacturing variations, resulting in an enriched and unique transient free-decay signature in the resonator's time-domain response following a pulse excitation. From 22 fabricated devices, the inter-device Hamming distance (inter-HD) exhibits an ideal mean of μ=0.4980 with a standard deviation of σ=0.0364, and the generated bitstreams successfully pass all NIST randomness tests, confirming strong uniqueness and randomness. While repeated measurements show a non-ideal intra-device Hamming distance (intra-HD) of μ=0.2968 and σ=0.0324, indicating native bit instability common to many PUF designs, this can be effectively addressed using standard error-correction schemes.
Event(s)
39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026, 25 January 2026 - 29 January 2026, Salzburg
Subjects
digitization
hardware security
mode localization
mode-localized resonators
Physical unclonable function
PUF
Publisher
Institute of Electrical and Electronics Engineers Inc.
Type
conference paper