CMOS-MEMS test-key for extracting wafer-level mechanical properties

Journal

Sensors (Switzerland)

Journal Volume

12

Journal Issue

12

Pages

17094-17111

Date Issued

2012

Author(s)

Chuang, W.-C.

Hu, Y.-C.

Chang, P.-Z.

DOI

10.3390/s121217094

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486821

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84871677168&doi=10.3390%2fs121217094&partnerID=40&md5=a49933259fd7d4fefb4b8aebd3af769b

Type

journal article