Structure and Electro-Optical Properties of Thin Films Grown by Alternate Atomic Layer Deposition of ZnO and Al2O3 on the Sapphire Substrate

Resource

Materials Transactions, 51(2), 219-226

Journal

Materials Transactions

Journal Volume

51

Journal Issue

2

Pages

219-226

Date Issued

2010

Date

2010

Author(s)

Ceh, Miran

Chen, Hsing-Chao

Shiojiri, Makoto

DOI

URI

Type

journal article

File(s)

Name

380.pdf

Size

23.47 KB

Format

Adobe PDF

Checksum

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