Synthesis and characterization of tris(β-ketoiminato)ruthenium(III) complexes: Potential precursors for CVD of Ru and RuO2 thin films

Journal

Chemical Vapor Deposition

Journal Volume

10

Journal Issue

3

Pages

149-158

Date Issued

2004

Author(s)

Chou, T.-Y.

Lai, Y.-H.

Chen, Y.-L.

Chi, Y.

Prasad, K.R.

Carty, A.J.

Lee, G.-H.

DOI

10.1002/cvde.200306284

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-3142761724&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/308154

Type

journal article