光纖通訊應用之微光機電系統元件
Date Issued
2002-07-31
Date
2002-07-31
Author(s)
黃榮山
DOI
902215E002031
Abstract
We report on a novel switchable corner
micromirror for wide free-space optical
applications. The corner mirror, composed
of two mutually orthogonal reflective
surfaces, may reflect incident light beam at
any angle back to its incoming direction. In
this report the corner micromirrors are able
to be batch fabricated. Each micromachined
corner mirror is constituted by three
elements: a vertical mirror, a movable
horizontal mirror, and a bottom electrode.
Incorporated with a grating and other optical
components, the new device may provide
simultaneous wavelength selection in free
space and switching function for wavelength
as well as intensity. Thus, the corner
micromirror may alleviate alignment
problems and simplify assembly procedure.
Publisher
臺北市：國立臺灣大學應用力學研究所
Type
report
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902215E002031.pdf
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Format
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