Design and Performance Verification of a Microscope Based Interferometer for Miniature Specimen Metrology

Resource

Optical Engineering 44 (8): 085602

Journal

Optical Engineering

Journal Volume

44

Journal Issue

8

Pages

-

Date Issued

2005-08

Date

2005-08

Author(s)

Wu, Giin-Yuan

Li, Chia-Ling

Chen, Zeng-De

Chen, Jau-Yu

URI

http://ntur.lib.ntu.edu.tw//handle/246246/120154

File(s)

Name

39.pdf

Size

436.7 KB

Format

Adobe PDF

Checksum

(MD5):cb03c993034c27f07fe7803c2df6469c