Effects of plasma species on the N incorporation of GaAsSbN grown by plasma-assisted gas-source molecular-beam epitaxy
Journal
Journal of Crystal Growth
Journal Volume
318
Journal Issue
1
Pages
363-366
Date Issued
2011-03
Author(s)
Abstract
We report the effects of plasma species on the N incorporation of GaAsSbN. Optical emission spectroscopy and quadruple mass spectroscopy were used to characterize the plasma source. We found a simple correlation between the atomic N species and meta-stable molecular N2 species that is independent of plasma power and N2 flow rate. In order to achieve atomic-N-rich growth conditions, we place a PBN shutter in front of our plasma source, rich in meta-stable N2(*) molecules, to facilitate the relaxation of N2(*) and turn the growth condition into an atomic-N-dominant one. When an atomic-N-rich condition is used, N incorporation rate decreases when Sb flux increases and increases as growth temperature increases. This behavior is well explained by a surface kinetics model. When a N2(*)-rich condition is used, the N incorporation in GaAsSbN is enhanced by increase in Sb flux and growth temperature. © 2010 Elsevier B.V. All rights reserved.
SDGs
Type
journal article