In-situ lateral confocal microscopic surface profilometry with vibration-resistance capability

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

7544

Date Issued

2010

Author(s)

Chen, L.-C.

Li, C.-K.

Chang, Y.-W.

LIANG-CHIA CHEN

DOI

10.1117/12.885565

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447863

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-79952772679&doi=10.1117%2f12.885565&partnerID=40&md5=fbfc49d67d13e02d3ebe99cc3c9ac871

Type

conference paper