Three Dimensional Simulations of Enhancing Energy Concentration for a Dual-channel Quartz Crystal Microbalance Thickwise Shear Resonance
Date Issued
2009
Date
2009
Author(s)
Liao, Ming-Wei
Abstract
With the increasing need for gauge and the substantial progress of wafer fabrication technique, Multi-channel Quartz Crystal Microbalance (MQCM) is very attractive for biosensor applications. n this paper, 2D simulations are performed first. The mesa-design dual-channel QCM is utilized to improve the sensitivity and stability. However, the energy trapping effect will decrease suddenly under some specific geometry. This phenomenon is called dropping effect, and those specific sizes are called dropping points. Then, under the assumption of 2D plane strain problems, three distinct 3D mesa-design models are introduced for the simulation. Then, the energy trapping effect varied with mesa height will be discussed for each. Unfortunately, the dropping effect still exists. Therefore, to meliorate the phenomenon, the bi-step design is recommended. Finally, the suggested design dimension and model have been established by the process of optimizing dual-channel quartz crystal microbalance.
Subjects
dual-channel quartz crystal microbalance
piezoelectric material
mesa design
bi-step design
energy trapping effec
finite element method
Type
thesis
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