Shallow trench isolation geometric influence of a recessed surface on array-type arrangements of nano-scaled devices strained by contact etch stop liner and Ge-based stressors

Journal

Thin Solid Films

Journal Volume

618

Pages

172-177

Date Issued

2016

Author(s)

Hsieh, C.-P.

Liao, M.-H.

Lee, C.-C.

Cheng, T.-C.

Wang, C.-P.

Huang, P.-C.

Cheng, S.-W.

DOI

10.1016/j.tsf.2016.03.015

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447953

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84961226283&doi=10.1016%2fj.tsf.2016.03.015&partnerID=40&md5=d188bc06b92a8b4a42e99e5847db84f0

SDGs

[SDGs]SDG9

Type

journal article