Surface Integrity of Silicon Wafer in Ultra Precision Machining
Resource
Int. J. of Adv. Manuf. Technology,,29(3),372-378.
Journal
Int. J. of Adv. Manuf. Technology
Journal Volume
29
Journal Issue
3
Pages
372-378
Date Issued
2007-01
Date
2007-01
Author(s)
Young, H.T.
Liao, H.T.
Type
journal article