Vibration Mode Suppression in Micromechanical Resonators Using Embedded Anti- Resonating Structures
Journal
Journal of Microelectromechanical Systems
Journal Volume
30
Journal Issue
1
Pages
53-63
Date Issued
2021
Author(s)
Abstract
This paper presents a technique for suppressing specific resonance modes of micromechanical resonators by mechanical means. In particular, attaching multiple miniaturized beam structures with properly designed dimensions acting as anti-resonating tuned mass dampers (TMD's) to a micromechanical clamped-clamped beam (CC-beam) resonator based on a CMOS-MEMS process platform successfully attenuate the dynamic frequency response of the fundamental mode while retaining the 2nd harmonic mode of the CC-beam. The measured results show that the frequency transmission response of the TMD-embedded CC beam drops as much as ? 12 dB compared to that of a reference resonator. An analytical model is used to study the effects of the parameter variations of the TMD structures. This technique provides an alternative approach to mechanically suppressing vibration modes for the micromechanical resonators that cannot employ the conventional quarter-wavelength support technique. [2020-0289]. ? 1992-2012 IEEE.
Subjects
Frequency response; Clamped-clamped beam; Frequency transmissions; Fundamental modes; Measured results; Micro-mechanical; Quarter-wavelength; Resonating structures; Tuned mass dampers; Micromechanical resonators
Type
journal article