In-situ process for AlGaAs compound semiconductor: Materials science and device fabrication
Journal
Journal of electronic materials
Journal Volume
23
Journal Issue
7
Pages
625-634
Date Issued
1994
Author(s)
Choquette, KD
Mannaerts, JP
Grober, LH
Freund, RS
Vakhshoori, D
Chu, SNG
Luftman, HS
Wetzel, RC
Type
journal article