A study on the portable SAW gas sensor based on ZnO nanorods
Date Issued
2013
Date
2013
Author(s)
Luo, Jia-Wei
Abstract
In recent years, the emerging of global oil crisis- has aroused the research on the finding of alternative energy . Water gas is composed of the carbon monoxide and hydrogen, it can react with catalyst to form hydrocarbons, and further processed to the gasoline, diesel oil and liquefied petroleum gas etc. Water gas is also a good hydrogen material. Compared with other energy, hydrogen is a green alternative energy, but has the drawback of its easy explosive. Any leak of hydrogen over a wide range of concentration (4%-75%) will result in explosion. The carbon monoxide is one of the most harmful pollutants which is colorless, odorless and tasteless. When human inhale the CO, it could cause symptoms of headaches, dizziness and even death. Hence, monitoring the condition of hydrogen and carbon monoxide gas is important for environmental protection and human safety. The carbon monoxide and hydrogen SAW sensor is developed for its stability, sensitivity, convenience and low cost.
In this thesis, a 145 MHz SAW gas sensor based on 128°YX-LiNbO3 SAW resonators is fabricated. The ZnO nanorods and the adsorption of gold nanoparticles or platinum were adopted as the sensing material. Dual delay line configuration was employed to eliminate temperature and humidity fluctuations. In order to enhance the sensitivity of the gas detection, periodically patterned ZnO nanorods sensing film were placed at the antinodes of the standing wave. The results show that the periodically patterned ZnO possesses superior sensing response than the full area patterned ZnO. Finally, we utilized a programmable processor to integrate the the hydrogen and the carbon monoxide SAW sensors and develop a portable dual gas sensor.
Subjects
表面聲波式振盪器
一氧化碳(氫氣)感測器
氧化鋅奈米柱
奈米金、鉑催化劑
Type
thesis
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