Nanotexture electrode on nanoporous AAO dielectric for micro tactile sensing devices
Journal
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Start Page
100
End Page
103
ISSN
10846999
Date Issued
2009
Author(s)
Abstract
This study reports the integration ofnano-texture electrode and self-assembly anodic aluminum oxide (AAO) dielectric layer on Si-substrate for capacitive-type micro tactile sensing devices. The advantages of these nano-structure micro devices are as follows, (1) employing AAO as dielectric film for its large dielectric constant (2.5-fold higher than oxide), and high electrical resistance; and (2) employing the AAO with nanoporous as template to form the nano-texture on metal electrode film to increase sensing area. Thus, the sensitivity of tactile sensor is increased. In application, the MOS (Au-AAO-Si) and the parallel-plate (Au-AAO-Ti) capacitors are fabricated on Si-substrate and then characterized. These two capacitors also show their capability as a tactile sensing device for tiny objects by detecting the contact of Drosophila and ant. ©2009 IEEE.
Event(s)
22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
Description
22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, 25 January 2009 through 29 January 2009, Sorrento
Type
conference paper