Design and experimental verification of a planar type two-dimensional piezoelectric actuator

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

11376

Date Issued

2020

Author(s)

Kao, Y.-T.

Hsu, Y.-H.

Lee, C.-K.

DOI

10.1117/12.2557970

URI

https://www.scopus.com/inward/record.url?eid=2-s2.0-85085737143&partnerID=40&md5=bc2c05e302d4437438d56176fa2a605d

https://scholars.lib.ntu.edu.tw/handle/123456789/546907

SDGs

[SDGs]SDG7

Type

conference paper