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College of Electrical Engineering and Computer Science / 電機資訊學院
Computer Science and Information Engineering / 資訊工程學系
Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanning
Details
Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanning
Journal
IEEE/ASME Transactions on Mechatronics
Journal Volume
21
Journal Issue
5
Pages
150-160
Date Issued
2016
Author(s)
Wu, Jim-Wei
Yi-Ting Lin
Yu-Ting Lo
Wei-Chih Liu
Kuang-Yao Chang
Da-Wei Liu
Li-Chen Fu
LI-CHEN FU
DOI
10.1109/tmech.2016.2577739
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/429576
Type
journal article