Cost-effective and channel-scalable hardware decoders for multiple electron-beam direct-write systems

Journal

Journal of Micro/Nanolithography, MEMS, and MOEMS

Journal Volume

17

Journal Issue

03

Pages

1

Date Issued

2018

Author(s)

Yu, Chun-Chang

Lin, Pei-Chun

Lu, Yi-Chang

CHUNG-PING CHEN

DOI

10.1117/1.JMM.17.3.031202

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448070

URL

https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/volume-17/issue-03/031202/Cost-effective-and-channel-scalable-hardware-decoders-for-multiple-electron/10.1117/1.JMM.17.3.031202.full

Type

journal article