Non-delta-chrome optical proximity correction methodology for process models with three-dimensional mask effects (vol 10, 033010, 2011)

Journal

Journal of Micro-Nanolithography Mems and Moems

Journal Volume

10

Journal Issue

4

Pages

049801

Date Issued

2011

Author(s)

Ng, Philip C. W.

Tsai, Kuen-Yu

Melvin, Lawrence S.

DOI

URI

SDGs

[SDGs]SDG9

Type

journal article