Error Analysis for Diffraction Grating Interferometric Stylus Probing System

Resource

Measurement Science and Technology 12 (4): 482-490

Journal

Measurement Science and Technology

Journal Volume

12

Journal Issue

4

Pages

482-490

Date Issued

2001

Date

2001

Author(s)

Fan, K.C.

Su, C.D.

Mou, J.I.

URI

Type

journal article

File(s)

Name

16.pdf

Size

276.06 KB

Format

Adobe PDF

Checksum

(MD5):19ae163ccdf475168502fc7b4d5762eb