微流通道的光電性質研究
Date Issued
2004-07-31
Date
2004-07-31
Author(s)
詹國禎
DOI
922218E002039
Abstract
The objective of the study is to setup the Fabrication process of the microfluid
devices and study of the electrical characterization in biomolecular aqueous solution.
We use the process of the silicon semiconductor and the MEMS techniques on silicon
wafer, and make different microchannels on it. By loading a small amount of DNA
reagents in the microchannel and applying Voltage on the both side of the
microchannel, the variation of the current of DNA aqueous solutions was carried out
and detected.
In the process of the Fabrication, we attempt some different methods to product
etching mask and confer their quality for wet etching process. We also use wet etching
and dry etching method to make the microchannel,and fabricate three chips with its
particular purpose.
Furthermore, the curve of current versus voltage and the curve of current versus
time were recorded precisely in time by a high-resolution measurement system. With
these results, we discover the distinct divergences in different DNA reagents. It was
successfully to distinguish the reagents as dGTP, dATP, dTTP, dCTP.
Subjects
microchannel
silicon wafer
high-resolution measurement
system
system
Publisher
臺北市：國立臺灣大學電機工程學系暨研究所
Type
report
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