Cubic HfO2 Doped with Y2O3 for Advanced Gate Dielectrics by MBE.

Journal

APS Meeting Abstracts

Journal Volume

1

Pages

41004

Date Issued

2006

Author(s)

Yang, ZhiKai

Lee, WC

Chang, Pen

Huang, MoLin

Huang, Yi Lin

Huang, CM

Hsu, CH

Kwo, Raynien

URI

http://scholars.lib.ntu.edu.tw/handle/123456789/323215

Type

conference paper