Substrate effect on characteristics of PbZrxTi 1-xO3 (PZT) film
Journal
Integrated Ferroelectrics
Journal Volume
150
Journal Issue
1
Pages
51-58
Date Issued
2014
Author(s)
Abstract
The paper presents the effect of substrates on the characteristics of PbZrxTi1−xO3 (PZT) thin film fabricated by sol-gel spin coating technology. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on various substrates, including copper (Cu), alumina (Al2O3), stainless steel (SS) and titanium (Ti). The dielectric characteristics and orientation of films had been measured by SEM, LCR meter, XRD for comparison. The experimental results indicate that the substrates having the similar characteristics with PZT film would result in better crystallization, charge storage capacity and energy transfer efficiency of film.
SDGs
Type
journal article