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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Selective etching of InAsPSb and GaSb in HCl-H2O2-H2O solution
Details
Selective etching of InAsPSb and GaSb in HCl-H2O2-H2O solution
Journal
IEDMS 2012, international electron devices and materials symposium
Pages
CP09
Date Issued
2012-12
Author(s)
S. H. Li
C. J. Wu
HAO-HSIUNG LIN
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/373907
Type
conference paper