Comparison of the piezoelectric energy harvesters with Si- MEMS and metal-MEMS

Journal

Journal of Physics: Conference Series

Journal Volume

557

Journal Issue

1

Date Issued

2014

Author(s)

Wu, W.J.

Chen, C.T.

Lin, S.C.

Kuo, C.L.

Wang, Y.J.

Yeh, S.P.

DOI

10.1088/1742-6596/557/1/012027

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451981

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84915749194&doi=10.1088%2f1742-6596%2f557%2f1%2f012027&partnerID=40&md5=445d91c5c11881d819863b7c5b428d25

Type

conference paper