Comparison of the piezoelectric energy harvesters with Si- MEMS and metal-MEMS
Journal
Journal of Physics: Conference Series
Journal Volume
557
Journal Issue
1
Date Issued
2014
Author(s)
Abstract
This paper presents the development of piezoelectric energy harvesters based on silicon and stainless steel substrates, which have the ability to harvest mechanical energy from surrounding vibrations and transform vibration energy into useful electrical power. Our experimental results show that the silicon-based device had a maximum output power of 0.9 μW with 1.0 VP-P output voltage excited at 107.9 Hz under a 0.25 g vibrating source. The metal- based device had a maximum output power of 2.7 μW with 1.5 VP-P output voltage at a vibration frequency of 108.6 Hz and 0.25 g acceleration. The areal power density was 0.02 μW mm−2 and 0.05 μW mm-2 for the devices based on silicon and on stainless steel, respectively. The silicon- based devices broke when the device excited exceed 0.25g acceleration, while the metal-based devices can sustained for vibration level higher than 2g acceleration. The stainless steel based device is therefore proved to be much more reliable than silicon based device.
SDGs
Type
conference paper