The growth of large-area superconducting YBa2Cu3O7-x thin films by pulsed laser ablation
Journal
Materials Chemistry and Physics
Journal Volume
43
Journal Issue
1
Pages
66-69
Date Issued
1996
Author(s)
Abstract
In-situ growth of 2-in. diameter superconducting YBa2Cu3O7-x (YBCO) thin films using an excimer KrF pulsed laser has been studied. Films with critical transition temperature (Rc,0) of 89±1 K and critical current density (Jc,77K) in excess of 1×106 A cm-2 have been prepared routinely. Uniformity in film thickness of below ±15% and film composition of ±5% have been measured. The effects of gas nozzle geometry and target evolution during ablation on the superconducting properties and surface morphology of YBCO thin films have also been investigated.
Type
journal article
