Design and Application of a One-side Actuating Diaphragm Micropump
Date Issued
2008
Date
2008
Author(s)
Chen, Bo-Ren
Abstract
A new type of micropump, a one side actuating diaphragm micropump, has been successfully developed to actuate liquid by the vibration of a diaphragm. The micropump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 28 mm ? 5 mm. Both valves and diaphragm are manufactured from PDMS. This Thesis indicates that the performance of the micropump is affected by the design of check valves, pump chambers, input voltages and frequencies. The improved design shows that the maximum flow rate is 4.4 ml/s and the maximum pump head is 8.33 kPa under ?50 V. In addition, the application of one-side actuating piezoelectric micropump (OAPCP-micropump), which is directly combined with a 45mm
Subjects
Micropump
Piezoelectric device
Liquid cooling
Valve
Cold Plate
Type
thesis
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