Modeling, analysis, simulation and control of semiconductor manufacturing systems: a generalized stochastic colored timed Petri net approach

Resource

Systems, Man, and Cybernetics, 1999. IEEE SMC '99 Conference Proceedings. 1999 IEEE International Conference on

Journal

IEEE International Conference on Systems, Man, and Cybernetics, 1999

Pages

-

Date Issued

1999-10

Date

1999-10

Author(s)

Lin, Ming-Hung

DOI

DOI

N/A

URI

SDGs

[SDGs]SDG9

Type

journal article

File(s)

Name

00823325.pdf

Size

581.79 KB

Format

Adobe PDF

Checksum

(MD5):ca280b01f173d4add24f9036f448a626