Design Criteria for a Push-On Push-Off MEMS Bistable Device

Journal

Journal of Microelectromechanical Systems

Journal Volume

25

Journal Issue

5

Pages

900-908

Date Issued

2016

Author(s)

Huang, H.-W.

Lee, F.-W.

Yang, Y.-J.J.

DOI

10.1109/JMEMS.2016.2574874

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448459

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84981738030&doi=10.1109%2fJMEMS.2016.2574874&partnerID=40&md5=0f9363d93f82dcff41d5131b05f0ff55

SDGs

[SDGs]SDG7

Type

journal article