CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars

Journal

Microsystem Technologies

Journal Volume

19

Journal Issue

2

Pages

151-157

Date Issued

2013

Author(s)

Tsung-Fu Yao

Sen-Yeu Yang

URI

http://www.sciencedirect.com/science/article/pii/S0167931712000366

https://scholars.lib.ntu.edu.tw/handle/123456789/587634

Type

journal article