Enhancing the Emission Efficiency of Infrared Thermal Emitter and Its Application on Miniature CO2 Gas Sensing System
Date Issued
2013
Date
2013
Author(s)
Wu, Pei-Wen
Abstract
In this thesis, the emission intensity and conversion efficiency of WTE is optimized. Several techniques are studied. First, silicon substrate is thinned by wet etching and the relationship between substrate thickness and power consumption are measured. The minimum thickness for fabrication is determined for reducing heat dissipation. Then the input power is decreased and the conversion efficiency is increased by concentrating the heating area through appropriate design of the electrode. Furthermore, the optimized hole area distribution and thickness of top metal layer for reaching much higher emission intensity are also determined. It is also demonstrated that incorporating random metallic nanoparticles formed by rapid thermal annealing in periodic hole arrays could effectively enhance the emissivity of WTE. Different kinds of metallic film which result in different sizes and randomly distributed nanoparticles are investigated. And gold NPs is the best for enhancing emissivity. Finally, it is found that the emissivity increased 76% as compared to the traditional WTE by combining all the optimized factors.
Moreover, the WTE device with high emissivity has also been used in the miniatured CO2 sensing system. In addition, with the interface circuits and mirror module, the sensitivity of detection is enhanced dramatically. The trend between delta voltage and CO2 concentration in system is very stable. So, the stable miniature CO2 detection system is realized and a reliable database for the environmental safety and healthcare is set up. This result will be beneficial for the portable biomedical device in the future.
Subjects
紅外線發射器
效率增強
金屬表面電漿
奈米粒子
電極
氣體偵測
Type
thesis
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