Interfacial Reactions of r.f-Sputtered TiNi Thin Film on (100) Silicon with SiN Diffusion-Barrier
Resource
Philosophical Magazine A,84,1209-1218.
Journal
Philosophical Magazine A
Journal Issue
84
Pages
1209-1218
Date Issued
2004-12
Date
2004-12
Author(s)
Wu, S.K.
Su, J.J.
Wang, J.Y.
Type
journal article