Infrared studies of laser induced oxide on (1 0 0) Si and SiGe layers

Resource

Materials Chemistry and Physics 65 (3): 350-353

Journal

Materials Chemistry and Physics

Journal Volume

65

Journal Issue

3

Pages

350-353

Date Issued

2000

Date

2000

Author(s)

Liu, C. W.

Huang, Y. S.

Chen, C. Y.

Gurtler, S.

Yang, C. C.

Chang, Y.

Chen, L. P.

URI

Type

journal article

File(s)

Name

12.pdf

Size

109.4 KB

Format

Adobe PDF

Checksum

(MD5):5a05c77fa43fa59b4cccb1f924c14826