Cytochrome c thin film with high temperature of coefficient resistance for infrared detection
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
8155
Date Issued
2011
Author(s)
Chu, C.H.
Abstract
The cytochrome c (protein) thin film on the oxide surface has been reported high temperature coefficient of resistance (TCR). The protein thin film resistance acts as exponential grow under the constant voltage bias. The experimental results showed that the TCR exceeded 20% 1/K, which is 5times higher than popular vanadium oxide (VOx). We also found the protein thin film can be attached on to the SU8 photoresist surface by changing the SU8 surface more hydrophilic and simple spinning coat technique. The cytochrome c thin film on SU8 also showed the high TCR. With easy fabrication methods and lower thermal conductivity of SU8 and protein, we believe that it is possible to fabricate new generation microbolometer based on cytochrome c protein and SU-8 photoresist.
Type
conference paper