Hydrogen plasma processing of GaAs and AlGaAs

Journal

Journal of Vacuum Science & Technology B

Journal Volume

11

Journal Issue

6

Pages

2025-2032

Date Issued

1993

Author(s)

Choquette, Kent D

Freund, RS

Luftman, HS

Chu, SNG

Mannaerts, JP

Wetzel, RC

URI

http://scholars.lib.ntu.edu.tw/handle/123456789/302763

Type

journal article