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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Sidewall smoothing for Si/SiO2 waveguides by excimer laser reformation
Details
Sidewall smoothing for Si/SiO2 waveguides by excimer laser reformation
Journal
Conference on Lasers and Electro-Optics Europe
Date Issued
2007
Author(s)
Hung, S.-C.
Liang, E.-Z.
CHING-FUH LIN
DOI
10.1109/CLEOE-IQEC.2007.4386517
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-51249115804&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/332075
Type
conference paper