Design and Performance of a One-side Actuating Diaphragm Micropump
Date Issued
2008
Date
2008
Author(s)
Lin, Cheng-Yao
Abstract
The performance of a one-side actuating diaphragm micropump based on the previous study has been improved. Being compact structured, the micropump drives liquid by a piezoelectric device, which consumes less energy than traditional motors. The input sinusoidal signal to the driving device is ?50 V ranged from 50 Hz to 170 Hz. The correlation among the components of the pump is studied. Through the study of the check valves, the improved flow rate rises from 1.20 ml/s to 2.67 ml/s. The best performance on a newly designed pump chamber is 4.40 ml/s with a maximum pump head of 8.33 kPa. It is capable of circulating liquid in a closed loop and is tested in a heat dissipation system. The result shows the thermal resistances of the cold plate on a 30 W dummy heater in the open system and the circulation liquid cooling system are 0.27 ?C/W and 0.45 ?C/W, respectively, in laptop application.
Subjects
Diaphragm
Micropump
Piezoelectric device
Liquid cooling
Valve
Type
thesis
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