微型週期性結構表面聲波頻溝理論分析與微機電實驗初探
Date Issued
2003-10-31
Date
2003-10-31
Author(s)
DOI
912212E002057
Abstract
The purpose of the research is to study the
characteristics of the acoustic band gaps in
the 2D phononic crystals. The phononic
crystal is a kind of periodic elastic material
structure that exists band gaps, in which the
elastic wave propagation of particular
frequency is forbidden. The band gaps
phenomena are studied using the plane-wave
expansion method, which is composed of
the Bloch’s theorem and of the reciprocal
lattice vector. The IDT (inter-digital
transducer) and a micro scale 2D phononic
crystal consists of silicon with a square
periodic arrangement of cylindrical holes
were designed to verify the band gaps of
surface acoustic waves. The fabrication
process using the MEMS (Micro Electro
Mechanical Systems) technique were
studied and realized in the research. These
results provide useful guidelines for the
design of a phononic crystal device as a
frequency filter.
Subjects
phononic crystals
band gaps
plane wave expansion method
SAW
(surface acoustic wave)
(surface acoustic wave)
Publisher
臺北市：國立臺灣大學應用力學研究所
Type
report
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