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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Young's modulus of high aspect ratio Si3N4 nano-thickness membrane
Details
Young's modulus of high aspect ratio Si3N4 nano-thickness membrane
Journal
2007 7th IEEE International Conference on Nanotechnology
Pages
1341-1344
Date Issued
2007
Author(s)
Chen, P.-H.
Yang, C.-H.
Tsai, C.-Y.
Chang, T.-L.
Hsu, W.-C.
PING-HEI CHEN
DOI
10.1109/NANO.2007.4601367
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-52949144254&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/330402
Type
journal article