A New Design of 3-DOF Flexure-Mechanism Positioner with Electromagnetic Technology
Resource
Proc. 45th IEEE Conference on Decision and Control
Journal
Proceedings of the IEEE Conference on Decision and Control
Pages
603-608
Date Issued
2006
Date
2006
Author(s)
Abstract
In this paper, We present the design, control and implementation of a novel, compact and three degree-offreedom (DOF) precise flexure-mechanism electromagnetic-actuating positioning system with submocrometer-scale precise positioning capability and millimeter-level large travel range. The design of the positioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and the eddy-current sensors to achieve the 3-DOF motion. The positioner presented herein shows the planar travel range of 1mm×1mm with a position resolution of ±300 nm. To let the compact system be more robust and stable in positioning, we propose an adaptive sliding-mode controller. We will demonstrate the satisfactory performance of the positioning system, including stiffness and precision, with theoretical analysis and experimental results. ©2006 IEEE.
Event(s)
45th IEEE Conference on Decision and Control 2006, CDC
Subjects
Adaptive controller; Parallel flexure mechanism; Positioner; Precision positioning
Other Subjects
Actuators; Control equipment; Eddy currents; Electromagnetic field effects; Robust control; Sliding mode control; Adaptive controllers; Electromagnetic actuators; Parallel flexure mechanism; Precision positioning; Degrees of freedom (mechanics)
Type
conference paper