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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
On the design of the latch mechanism for wafer containers in a SMIF environment
Details
On the design of the latch mechanism for wafer containers in a SMIF environment
Journal
Journal of Mechanical Science and Technology
Pages
p.2025-2033
Date Issued
2006
Author(s)
J.J. Lee
D.Z. Chen
W.M. Pai
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/415781
Type
journal article
