A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process
Journal
Journal of Lightwave Technology
Journal Volume
21
Journal Issue
7
Pages
1700-1708
Date Issued
2003
Author(s)
Abstract
This paper presents the design, fabrication, and operation of a newly developed micromechanical optical scanner array using a translating microlens. We have used photoresist reflow technique to form a microlens on a surface micromachined XY-stage of the scratch-drive actuation mechanism. The lens scanner is placed at the focal length from an incident optical fiber to collimate the transmitting light. The collimated beam is steered two-dimensionally by the XY-motion of the microlens with respect to the incident fiber. We also have developed a theoretical model to predict appropriate initial resist thickness and diameter for the scanning lens. An optical scanning angle of ±7° has been demonstrated by sliding a microlens of 670-μm focal length at a physical stroke of ±67 μm. Typical angular positioning resolution has been estimated to be 0.018°.
Subjects
Microactuator; Microlens; Optical scanner; Photoresist reflow technique; XY-stage
Other Subjects
Mathematical models; Microlenses; Optical fibers; Optical switches; Photoresists; Thickness measurement; Wavelength division multiplexing; Optical scanning angle; Photoresist lenses; Thermal reflow process; Optical devices
Type
journal article