Microlenticular lens replication by the combination of gas-assisted imprint technology and LIGA-like process
Journal
Journal of Micromechanics and Microengineering
Journal Volume
22
Journal Issue
9
Date Issued
2012
Author(s)
Abstract
Abstract A mold used in creating diffractive optical elements significantly affects the quality of these devices. In this study, we improved traditional microlens fabrication processes, which have shortcomings, mainly by combining gas-assisted imprint technology and the lithographie galvanoformung abformung (LIGA)-like process. This combination resulted in the production of high-quality optical components with high replication rates, high uniformity, large areas and high flexibility. Given the pixel size of the panel used, the optimal viewing distance, the film thickness and the glass thickness in the formula, we could determine the radius of curvature and the thickness of the lens. By the use of U-groove machining, precise electroforming and embossing to produce polydimethylsiloxane (PDMS) molds, lens film elements can be produced via an ultraviolet (UV)-cured molding process that converts microlenses into flexible polyethylene terephthalate films. In this study, the microlenticular lens mold is fabricated by U-groove machining, Ni electroforming and PDMS casting. Then, the PDMS mold with microlenticular lens structure is used in the gas-assisted UV imprint process and the PET film with microlenticular lens array is obtained. The lenticular lens had a radius of curvature and height of 228 and 18 µm, respectively. A 3D confocal laser microscope was used to measure the radius of curvature and the spacing of the metal molds, nickel (Ni) molds, PDMS molds and the finished thin-film products. The geometry of the final microlenticular lens was very close to the design values. All geometric errors were below 5%, the surface roughness reached the optical level (with all Ra values less than 10 nm) and the replication rate was 95%. The results demonstrate that this process can be used to fabricate gapless, lenticular-shaped, high-precision microlens arrays with a unitary curvature.
Type
journal article