Combined Raman and luminescence assessment of epitaxial 6H-SiC films grown on 6H-SiC by low pressure vertical chemical vapor deposition
Resource
Semicond. Sci. & Tech.,10,1418-1422.
Journal
Semicond. Sci. & Tech
Journal Issue
10
Pages
1418-1422
Date Issued
1995-01
Date
1995-01
Author(s)
Feng, Z.C.
Tin, C.C.
Hu, R.
Yue, K.T.
Type
journal article