Mid-infrared photodetection enhanced by localized surface plasmon resonance assisted NiSi/Si Schottky photodetectors
Journal
2021 IEEE Research and Applications of Photonics in Defense Conference, RAPID 2021
Date Issued
2021
Author(s)
Abstract
Here, inverted-pyramid array structures (IPAS) are applied on NiSi/n-Si Schottky photodetectors to generate surface plasmon resonance and improve the photoresponse in mid-infrared region. Consequently, compared with the planar devices, the current response of 8-μm-period IPAS devices increases 4.08 times in 3.2-μm light illumination. ? 2021 IEEE.
Subjects
Inverted pyramid arrays
Mid-infrared
NiSi
Schottky
Surface plasmon resonance
Infrared detectors
Nickel compounds
Photons
Silicon compounds
Array structures
Inverted pyramid array
Localized surface plasmon resonance
Mid-infrared regions
Midinfrared
Photoresponses
Pyramid arrays
Schottky photodetectors
Surface-plasmon resonance
Type
conference paper