Design and fabrication of 2D phononic crystals in surface acoustic wave micro devices
Resource
International Symposium on Nano Science and Technology, Tainan, Taiwan
Journal
Microelectromechanical Systems
Pages
593-596
Date Issued
2005
Date
2005
Author(s)
Gu, K.
Shieh, J.-C.
Shih, W.-P.
Type
conference paper