Development of a micro hole measuring system based on the capacitance principle

Journal

Measurement Science and Technology

Journal Volume

20

Journal Issue

10

Date Issued

2009

Author(s)

Chang, T.-Y.

Liao, Y.-S.

Liu, W.-C.

YUNN-SHIUAN LIAO

DOI

10.1088/0957-0233/20/10/105104

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448654

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-70350678598&doi=10.1088%2f0957-0233%2f20%2f10%2f105104&partnerID=40&md5=3b48aba9d847d315d84aa1beefeefd67

Type

journal article