Design and Fabrication of Screen Printed Thick Film and Stacked Aerosol Deposited Multilayer Piezoelectric Micro Energy Harvester
Date Issued
2015
Date
2015
Author(s)
Wang, Yin-Jie
Abstract
The concept of “Internet of Things” has become a hot topic in recent years, and the need for sensing devices has risen substantially. Due to the advancement of VLSI technology, the power consumption of micro-scale smart devices has gradually reduced to tens of microwatts. As such, the ability to produce this level of energy in large quantity has become an important task. Traditional use of power cord to supply energy or the usage of battery has proven to be quite inconvenient, for the placement of the devices may be hard to reach, and the lifetime of such power sources are often unreliable. A method that utilizes the environment to provide a self-powered electrical energy will be beneficial. Solar power can be used as a general resource, but in many cases the devices are installed in enclosed areas where lighting is insufficient. Therefore, vibrational energy sources has become a primary target for energy extraction. In order to create a piezoelectric energy harvester that is suitable to provide energy for further applications, a screen-printing technique to create thick film is discussed in chapter three of this paper. The technique is used to deposit high quality piezoelectric film in a short amount of time. In chapter four, the structure and design of the piezoelectric harvester is discussed, to improve the overall output of the harvester. Experimental results indicate that the PZT piezoelectric thick film has avoided the oxidation and vaporization of lead from the material when a sintering process has been done. The high temperature sintering process can preserve a better piezoelectric characteristic. Additionally, Aerosol deposition method is used to fabricate a multilayer micro energy harvester. By poling each layer’s dipole in parallel form, and connecting each layer in parallel to measure the performance, we can obtain the optimal load to be 15kΩ, and the optimal output power to be 80.14μW when the device is operating at its resonant frequency of 121.5Hz and under 1g acceleration. In comparison to a single-layer structured device, the output load resistance has been lowered to almost 10 times, and the output current at the optimal load has increase to about three times.
Subjects
MEMS
Piezoelectric material
Energy harvesting
Screen printing
Aerosol deposition
Type
thesis
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