Robust Control of a Two-Axis Piezoelectric Nano-Positioning Stage

Resource

Proceedings of the 18th IFAC World Congress, 3539-3544

Journal

18th IFAC World Congress

Pages

3539-3544

Date Issued

2011

Date

2011

Author(s)

Tsai, Yan-Chen

Hsieh, Chin-Hui

Chen, Lian-Sheng

Yu, Chung-Huang

URI

Type

conference paper

File(s)

Name

07.pdf

Size

23.53 KB

Format

Adobe PDF

Checksum

(MD5):b3fccaf985107e8e8fa088f9a6e8b137